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CHECKLIST FOR E5400 SPUTTER COATER

IMPORTANT: DO NOT ATTEMPT TO COAT SAMPLE IN THIS DEVICE IF THE GLUE (CARBON OR SILVER PAINT) IS STILL OUTGASSING. STUBS SHOULD DRY AT LEAST 24 HOURS IN A DESSICATOR.

A. Check that the instrument panel is at stand-by or OFF. NOTE: The VENT and LEAK valves are delicate. Gently turn clockwise until you feel slight resistance, then stop.
  1. Check that VENT and LEAK valves are closed. Twist gently clockwise.
  2. Check that the four position SELECTOR KNOB (OFF, PUMP, SET HT, CONTROL) is set to OFF.
  3. Check that the VOLTAGE KNOB is set to 0.
  4. Turn on FILM THICKNESS MONITOR (metal box on top of Coating unit).
  5. Turn on cooling water to specimen stage.
B. Load your samples.
  1. Open specimen chamber (lift aluminum lid back).
  2. Place up to 8 stubs in the chamber (DO NOT PUT STUB IN THE CENTER).
  3. Carefully close the top and make certain it is centered on the glass cylinder.
  4. Adjust height of the targe to that the shield is the same height as the sample.
C. Flushing chamber.
  1. Make sure that specimen chamber is closed.
  2. Open the main valve on the Argon tank one half turn counter clockwise (Gauge should be on the 5).
  3. Start the pump by moving the selector switch to PUMP.
  4. Allow the unit to pump to a vacuum of ~0.6 Pa.
  5. Open the LEAK valve counterclockwise to decrease the vacuum to ~13 Pa (3-4 turns of knob). Allow the system to flush for 10-30 seconds and then close the LEAK valve.
  6. Allow the system to pump again to a vacuum of ~0.6 Pa.
D. Setting tension.
  1. With VOLTAGE KNOB set to zero, rotate the SELECTOR KNOB to 'SET HT'.
  2. Adjust the VOLTAGE KNOB so that the DIGITAL PANEL METER reads 1kv.
  3. Open the LEAK valve until a plasma current of 20mA is shown on the meter.
  4. The DIGITAL PANEL METER should read 650-750V.
  5. Turn SELECTOR KNOB to CONTROL and set TIMER to 60 seconds.
E. Coating specimens.
  1. At the setting of 600V and 20mA an ultrafine coating of gold/palladium 15-20 angstroms grain size coats your sample at 70 angstroms per minute. A typical coating thickness of 150- 300 Angstroms is required.
  2. Zero the FILM THICKNESS MONITOR. If it doesn't zero, just add your thickness to the total.
  3. Leave the density on the FILM THICKNESS MONITOR at 16.4.
  4. Press START button. Coating will commence for 60 seconds.
  5. Pause 30 seconds before pressing START button for additional coating.
  6. Repeat as necessary until a coating of 15-30 nm (as seen on the thickness monitor) is obtained.
F. SPECIMEN REMOVAL/SHUTDOWN
  1. Set VOLTAGE KNOB to '0'.
  2. Close LEAK valve
  3. Turn SELECTOR KNOB to off
  4. Vent system to Argon by opening the vent valve one turn (counterclockwise).
  5. Wait for the chamber to come to atmospheric pressure.
  6. Close the chamber and close the VENT valve.
  7. Open the chamber and remove your samples.
  8. Turn off the Argon supply (main valve).
  9. Turn off FILM THICKNESS MONITOR.
  10. Turn off water to the specimen stage.
  11. Sign the log book.