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 Hitachi S5000 STARTUP Operation

Before starting the machine

  • Connect the Nitrogen line to the gas outlet of the liquid nitrogen tank in room 30 and open the valve. Verify that nitrogen pressure is sufficient by testing the yellow nitrogen gas line and blowing dust off the counters.
  • Check IP1, IP2, IP3 pressures to ensure that IP-1 < 1.5E-7, IP2 < 2E-6, and IP3 < 7E-5 Pa.
  • Confirm that the following lamps are lit on the front of the SEM column console: EVAC POWER switch is on, TMP and AIR PRES lamps are lit, IP1, IP2, and IP3 lamps are lit, the EVAC switch is depressed, EVAC LOCK is set to EVAC, and the S.C. VACUUM HIGH lamp is lit, and the green lamp of the specimen exchange device is lit.
  • Turn on the DISPLAY POWER switch - note, this is a lockout switch so you must pull it out slightly, as you turn it. Wait 10 minutes before the next step to allow the lens water temperature to stabilize.
  • Turn up brightness on main monitors until display is visible.
Do Flashing
  • If the total usage time from the last flashing is 8-12 hours, you should flash the gun by the procedure below
  • Open SC AIR LOCK VALVE - note, this is another lockout switch as before.
  • Verify that flashing intensity is set to 2, by pressing PF2 button on the main keyboard
  • Press FLASH STANDBY button in upper left of console. The LED above the button will begin to blink.
  • Press the HV ON button in the upper left of console. A flash emission current will display for 2 seconds, record this number in the log book.
  • Wait for 30 seconds, and then press the HV ON ADJ button, again record the emission and voltages (Vacc, Vext, uA).
  • You may need to depress the ON ADJ button to keep up the emission current to 10 uA, this is typically done after about 10 minutes after startup, and whenever needed. The gun should be stable after 30 minutes from initial startup.

 

Alignment

  • At the STD condition (button on goniometer controls near monitor), adjust the focus at 500 magnification using the set screw under the specimen stage. Release the STD button.
  • Press PF3, choose 3 (beam align). Increase the magnification until the beam fills 2/3 of the screen and center the spot on the screen using the STIGMA/ALIGNMENT X/Y knobs.
  • After centering, press RETURN on the keyboard and the Aperture alignment will be selected, press the right arrow key, and RETURN. At 50000 - 70000 Magnification, adjust the STIGMA/ALIGNMENT X/Y knobs to minimize movement of the image.
  • Press RETURN, and the STIGM ALIGN X will be chosen. Press the right arrow, and return again. At 10k-20k magnification, again adjust the STIGMA/ALIGNMENT X/Y knobs to minimize image movement.
  • Press return and repeat the last step for the STIGMA ALIGN Y.

Check the transfer position of the stage on the panel near the monitors, and press the EX POSIT button to position the holder for sample transfer. This must be done as damage to the specimen holder may result otherwise.

Load a specimen into sample wand for simple beam and aperture alignment calibration. Typically, any specimen from the dessicators can be used.

Removing empty wand from SEM: Press HV OFF button. Close the SC AIR LOCK VALVE. Press the EX POSIT button to position the empty wand for removal and make sure that the X, Y, and T of the stage goniometer is 0, 0, 0. Make sure that the EVAC lamp of the specimen exchange chamber is lit. Remove the holder following the instructions on the exchange port. Place the empty wand into the plexiglass holder on the SEM console.

Inserting sample wand into SEM: Insert the specimen wand into the specimen exchange chamber following the instructions on the exchange port.

Check that SC HIGH green light is lit, and open the SC AIR LOCK valve switch. Check that HV ready light is lit, and press the ON/ADJ button.

For normal operation, set the MODE CONTROL swtich to Normal position (rectangular box with four horizontal lines). Set the scan speed switch to TV. Press the RUN/STOP switch to light up the RUN lamp. Set magnification to the lowest level. Choose HIGH MAG, LOW MAG, or HIGH Z mode select as dependent upon your specimen.